Beijing Logon Sci. & Tech. Deve. Co., Ltd.
Main products:coating machine,ultrasonic cleaning machine,explosion spraying equipment
Contact Us
  • Contact Person : Ms. Chen Sharon
  • Company Name : Beijing Logon Sci. & Tech. Deve. Co., Ltd.
  • Tel : 86-10-62477220
  • Fax : 86-10-62474518
  • Address : Beijing,Beijing,Room B-1409, Sigma Plaza, No. 49 Zhichun Road, Haidian District
  • Country/Region : China
  • Zip : 100086

PVD coating machine

PVD coating machine
Product Detailed
1.thin film coating 2.high brightness 3.little impact 4.small heat and suit for decoration materials

The specification of the LD-600 voltaic arc ion vacuum coating equipment

A-Computer automatic control            B-switch board manual

Specification and model



Vacuum Chamber Inner Size


The size can be increased or decreased±10%

Effective coating space


The size can be increased or decreased±10%

Workpiece rotary frame

Rotation +revolution and rotation

Design according to the specific requirement

The layout of the  rotary frame

The top of Vacuum Chamber   downward install

lower ,

upward install,

can instead

Quantity of the hanging rod

4 rotation+8 revolution and  rotation

Can design according to the workpiece quantity

Rotary speed


speed governor adjust

variable-frequency governor

The maximum size of the workpiece


Hanger quantities and rotation radius


tools coating+ decorative coating

Workpiece material

Metal ,glass, ceramics etc.

Almost all material

Film material

TiN, TiAlN, CrN, TiC, TiCN, etc.

Tools  film ,

Multilayer film , Decorative film

Requirement of production space


Leave the space of operation and maintenance

Requirement of capacitance

50Hz 380V 40KVA

Installed capacity  not practical power consumptive

Requirement of cooling water

more than and equal to 3ton/hour circulating cooling water/ 25°C

Pollutant emission


None exhaust gas, wastewater, none scrap

Work noise

less than and equal to 90decibel

Vacuum air pump

2X-70rough pump+2X-30maintain pump

Roots pump


Can be increased

Diffusion pump


Can replace molecular pump according to the requirement

Ultimate vacuum

Overmatch 6×10-4Pa

Work vacuum

6.67×10-3 Pa

Exhaust speed

less than 20 minutes(atmosphere—work  vacuum)

Normal temperature

Pressure rising rate(leak rate)

less than and equal to 0.35Pa/h

Vacuum chamber material

304 stainless steel

Rotary frame material

Carbon steel plating

Cathode voltaic arc ion source

6 dynamoelectric striking the arc   indirect cooling

Direct cooling can instead

Target size


Grid bias power supply

20KW  20KHz Inverter power supply

The power can change according to the capacity

Voltaic arc power supply

6  0-200A electric current  tunable

Vacuum chamber heating power

15-18KW  temperature PID adjust

Control model


Manually operation(B)

Automatic control type have hand control

Automatic control system (A)

Industry control

 computer+ PLC+ LCD+ printer

Can control by touch screen

PVD coating machine

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