Beijing Logon Sci. & Tech. Deve. Co., Ltd.
Main products:coating machine,ultrasonic cleaning machine,explosion spraying equipment
Contact Us
  • Contact Person : Ms. Chen Sharon
  • Company Name : Beijing Logon Sci. & Tech. Deve. Co., Ltd.
  • Tel : 86-10-62477220
  • Fax : 86-10-62474518
  • Address : Beijing,Beijing,Room B-1409, Sigma Plaza, No. 49 Zhichun Road, Haidian District
  • Country/Region : China
  • Zip : 100086

PVD coating machine

PVD coating machine
Product Detailed
1.high film coating 2.high brightness 3.little impact 4.small heat 5.suit for decoration materials

The specification LD-6C20 magnetron sputtering ion vacuum coating equipment

A-Computer automatic control            B-switch board manual                       

Specification and model



Vacuum Chamber Inner Size


The size can be increased or decreased±10%

Effective coating space


The size can be increased or decreased±10%

Workpiece rotary frame

Revolution+ revolution and rotation

Design according to the specific requirements

The layout of the  rotary frame

The top of Vacuum Chamber   downward install

lower ,

upward install,

can instead

Quantity of the hanging rod

4 revolution+6-8 revolution and rotation

Can design according to the workpiece quantity

Rotary speed

0-5revolutions/minute(rotation)speed governor adjust

variable-frequency governor

The maximum size of the workpiece


Hanger quantities and rotation radius


Decorative coating

Workpiece material

Metal, glass, ceramics, plastics etc.

Almost all material

Film material

TiN, CrN, TiC, TiCN, etc.

Multilayer film,

Decorative film

Requirement of production space


Leave the space of operation and maintenance

Requirement of capacitance

50Hz 380V 60KVA

Installed capacity  not practical power consumptive

Requirement of cooling water

more than and equal to 3ton/hour circulating cooling water/ 25°C

Pollutant emission


None exhaust gas,


none scrap

Work noise

less than and equal to 90decibel

Vacuum air pump

2X-70rough pump+2X-30maintain pump

Roots pump


Can increase

Diffusion pump


Can replace molecular pump according to the requirement

Ultimate vacuum

Overmatch 6×10-4 Pa

Work vacuum

6.67×10-3 Pa

Exhaust speed

less than 20 minutes(atmosphere—work  vacuum)

Normal temperature

Pressure rising rate(leak rate)

less than and equal to 0.35Pa/h

Vacuum chamber material

304stainless steel

Rotary frame material

6 dynamoelectric striking the arc   indirect cooling

When the equipment upgrades option

Target size


Selectable configuration

Magnetron sputtering target

2(direct cooling)

Sputtering target size


Grid bias power supply

20KW  20KHz Inverter power supply

High-end configuration option(Already contains)

magnetron sputtering power supply

25KW  40KHz intermediate frequency pulse power source

Two set

Voltaic arc power supply

6  0-200A electric current  tunable

When the equipment upgrades option

Vacuum chamber heating power

15-18KW temperature PID adjust

Control mode


Manually operation(B)

Automatic control type have hand control

Automatic control system (A)

Industry control        computer+ PLC+ LCD+ printer

Can control by touch screen

PVD coating machine

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